Electro-physical properties of porous anodic alumina films for sensitive elements of MEMS
نویسندگان
چکیده
The results of a comprehensive study porous alumina film electrical properties obtained by anodizing in acid electrolytes have been presented. relationship was established between the structure oxide films, mechanism their formation, as well physicochemical characteristics. A targeted effect on microstructure films made it possible to control varying technological parameters without radical change method. This predict behavior nanostructures and for sensitive MEMS elements.
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ژورنال
عنوان ژورنال: Journal of physics
سال: 2021
ISSN: ['0022-3700', '1747-3721', '0368-3508', '1747-3713']
DOI: https://doi.org/10.1088/1742-6596/1954/1/012021